Pattern evaluation for in-plane displacement measurement of thin films
نویسندگان
چکیده
منابع مشابه
Plane-strain bulge test for thin films
The plane-strain bulge test is a powerful new technique for measuring the mechanical properties of thin films. In this technique, the stress–strain curve of a thin film is determined from the pressure-deflection behavior of a long rectangular membrane made of the film of interest. For a thin membrane in a state of plane strain, film stress and stain are distributed uniformly across the membrane...
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ژورنال
عنوان ژورنال: Experimental Mechanics
سال: 2005
ISSN: 0014-4851,1741-2765
DOI: 10.1007/bf02428986